Biomaterial Database

Interdigitated humidity sensors for a portable clinical microsystem. 2002

Céline Laville, and Claude Pellet

University of Bordeaux I, Laboratory IXL, Talence, France.

This paper presents and compares two capacitive humidity sensors with interdigitated electrodes for a portable clinical application. A polyimide-sensitive layer covers the first structures and the optimized ones include a benzocyclobutene-sensitive layer and a heating resistor. Humidity measurements results are presented, in particular sensors response time in absorption, which are very small (inferior to 500 ms). Next, mechanisms of absorption and adsorption in a polymer layer are described and the two structures are compared. Suitability of optimized sensors for our application is discussed: new structures allow us to increase sensitivity and decrease response time. When the structure is maintained at 40 degrees C by its heater, the response time is 200 ms and the total desorption time is 11 s.

UI	MeSH Term	Description	Entries
D008839	Microelectrodes	Electrodes with an extremely small tip, used in a voltage clamp or other apparatus to stimulate or record bioelectric potentials of single cells intracellularly or extracellularly. (Dorland, 28th ed)	Electrodes, Miniaturized,Electrode, Miniaturized,Microelectrode,Miniaturized Electrode,Miniaturized Electrodes
D008904	Miniaturization	The design or construction of objects greatly reduced in scale.	Miniaturisation,Miniaturisations,Miniaturizations
D008991	Monitoring, Physiologic	The continuous measurement of physiological processes, blood pressure, heart rate, renal output, reflexes, respiration, etc., in a patient or experimental animal; includes pharmacologic monitoring, the measurement of administered drugs or their metabolites in the blood, tissues, or urine.	Patient Monitoring,Monitoring, Physiological,Physiologic Monitoring,Monitoring, Patient,Physiological Monitoring
D012117	Resins, Synthetic	Polymers of high molecular weight which at some stage are capable of being molded and then harden to form useful components.	Dental Resins,Dental Resin,Resin, Dental,Resin, Synthetic,Resins, Dental,Synthetic Resin,Synthetic Resins
D004867	Equipment Design	Methods and patterns of fabricating machines and related hardware.	Design, Equipment,Device Design,Medical Device Design,Design, Medical Device,Designs, Medical Device,Device Design, Medical,Device Designs, Medical,Medical Device Designs,Design, Device,Designs, Device,Designs, Equipment,Device Designs,Equipment Designs
D004868	Equipment Failure	Failure of equipment to perform to standard. The failure may be due to defects or improper use.	Defects, Equipment,Device Failure,Failure, Equipment,Malfunction, Equipment,Medical Device Failure,Misuse, Equipment,Device Failure, Medical,Device Failures, Medical,Failure, Medical Device,Failures, Medical Device,Defect, Equipment,Device Failures,Equipment Defect,Equipment Defects,Equipment Failures,Equipment Malfunction,Equipment Malfunctions,Equipment Misuse,Equipment Misuses,Failure, Device,Failures, Device,Failures, Equipment,Malfunctions, Equipment,Misuses, Equipment
D006361	Heating	The application of heat to raise the temperature of the environment, ambient or local, or the systems for accomplishing this effect. It is distinguished from HEAT, the physical property and principle of physics.
D006813	Humidity	A measure of the amount of WATER VAPOR in the air.	Humidities
D000327	Adsorption	The adhesion of gases, liquids, or dissolved solids onto a surface. It includes adsorptive phenomena of bacteria and viruses onto surfaces as well. ABSORPTION into the substance may follow but not necessarily.	Adsorptions
D000535	Aluminum	A metallic element that has the atomic number 13, atomic symbol Al, and atomic weight 26.98.	Aluminium,Aluminium-27,Aluminum-27,Aluminium 27,Aluminum 27