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Experimental evaluation of a spherical aberration-corrected TEM and STEM. 2005
Hidetaka Sawada, and
Takeshi Tomita, and
Mikio Naruse, and
Toshikazu Honda, and
Paul Hambridge, and
Peter Hartel, and
Maximilian Haider, and
Crispin Hetherington, and
Ron Doole, and
Angus Kirkland, and
John Hutchison, and
John Titchmarsh, and
David Cockayne
We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better than 0.12 nm. For scanning transmission electron microscopy, the Ronchigram flat area was >40 mrad in half-angle using the probe-forming Cs-corrector.
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