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Light-scattering characterization of transparent substrates. 2006
Institut Fresnel, Unité Mixte de Recherche-CNRSTIC 6133, Ecole Généraliste d'Ingénieurs de Marseille, Université Paul Cézanne Aix-Marseille I, Domaine Universitaire de St. Jérôme, 13397 Marseille Cedex 20, France. myriam.zerrad@fresnel.fr
Angle-resolved light scattering has been used for decades to quantify the surface roughness of optical components. However, because this technique is affected by the contribution of both interfaces of the sample, it cannot be applied to transparent substrates. We show how to overcome this issue and apply these principles to the characterization of superpolished samples.
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