BIOMAT Database Logo BIOMAT Database Logo

Improved rate control for electron-beam evaporation and evaluation of optical performance improvements. 2006

Michael Gevelber, and Bing Xu, and Douglas Smith
Manufacturing Engineering, Boston University, 15 Saint Mary's Street, Brookline, Massachusetts 02446, USA.

A new deposition-rate-control and electron-beam-gun (e-gun) strategy was developed that significantly reduces the growth-rate variations for e-beam-deposited SiO2 coatings. The resulting improvements in optical performance are evaluated for multilayer bandpass filters. The adverse effect of uneven silica-source depletion on coating spectral performances during long deposition runs is discussed.

UI MeSH Term Description Entries

Related Publications

Michael Gevelber, and Bing Xu, and Douglas Smith
Stress control in optical thin films by sputtering and electron beam evaporation.
February 2017, Applied optics,
Michael Gevelber, and Bing Xu, and Douglas Smith
Evaluation of the electroanalytical performance of carbon-on-gold films prepared by electron-beam evaporation.
July 2020, The Analyst,
Michael Gevelber, and Bing Xu, and Douglas Smith
Electron beam evaporation of superconductor-ferromagnet heterostructures.
May 2022, Scientific reports,
Michael Gevelber, and Bing Xu, and Douglas Smith
[Application of Statistical Process Control in Evaluation of Performance for Beam-matched Medical Electron Linacs].
February 2021, Zhongguo yi liao qi xie za zhi = Chinese journal of medical instrumentation,
Michael Gevelber, and Bing Xu, and Douglas Smith
Amorphous dielectric optical coatings deposited by plasma ion-assisted electron beam evaporation for gravitational wave detectors.
March 2023, Applied optics,
Michael Gevelber, and Bing Xu, and Douglas Smith
A new evaluation method of electron optical performance of high beam current probe forming systems.
October 2005, Journal of electron microscopy,
Michael Gevelber, and Bing Xu, and Douglas Smith
Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation.
June 2002, Applied optics,
Michael Gevelber, and Bing Xu, and Douglas Smith
Note: Design of transverse electron gun for electron beam based reactive evaporation system.
May 2011, The Review of scientific instruments,
Michael Gevelber, and Bing Xu, and Douglas Smith
Control of growth mechanisms and orientation in epitaxial Si nanowires grown by electron beam evaporation.
April 2009, Nanotechnology,
Michael Gevelber, and Bing Xu, and Douglas Smith
In Vitro and in Vivo Evaluation of Silicate-Coated Polyetheretherketone Fabricated by Electron Beam Evaporation.
June 2016, ACS applied materials & interfaces,
Copied contents to your clipboard!