New scintillation detector of backscattered electrons for the low voltage SEM. 2007

Petr Wandrol
Institute of Scientific Instruments AS CR, Královopolská 147, 612 64 Brno, Czech Republic. wandrol@isibrno.cz

The new scintillation detector of backscattered electrons that is capable of working at primary beam energy as low as 0.5 keV is introduced. Low energy backscattered electrons are accelerated in order to generate a sufficient number of photons. Secondary electrons are deflected back by the energy filter so that the true compositional contrast of the specimen is obtained. The theoretical models of the detector function are described and first demonstration images are presented.

UI MeSH Term Description Entries

Related Publications

Petr Wandrol
September 1950, The Review of scientific instruments,
Petr Wandrol
May 1999, Journal of nuclear medicine : official publication, Society of Nuclear Medicine,
Petr Wandrol
November 2020, Ultramicroscopy,
Petr Wandrol
July 2023, Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada,
Copied contents to your clipboard!