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Residual stress in obliquely deposited MgF2 thin films. 2008
Cheng-Chung Jaing, and
Ming-Chung Liu, and
Cheng-Chung Lee, and
Wen-Hao Cho, and
Wei-Ting Shen, and
Chien-Jen Tang, and
Bo-Huei Liao
Department of Optoelectronic System Engineering, Optoelectronics Technology Research Center,Minghsin University of Science and Technology, Hsin-Chu 304, Taiwan. ccjaing@must.edu.tw
MgF(2) films with a columnar microstructure are obliquely deposited on glass substrates by resistive heating evaporation. The columnar angles of the films increases with the deposition angle. Anisotropic stress does not develop in the films with tilted columns. The residual stresses in the films depend on the deposition and columnar angles in a columnar microstructure.
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