Micromachined thin film plate acoustic wave resonators (FPAR): Part II. 2009

Ventsislav Yantchev, and Lilia Arapan, and Ilia Katardjiev
Department of Solid State Electronics, The Angstrom Lab, Uppsala University, Uppsala, Sweden. veya@angstrom.uu.se

Improved performance thin-film plate acoustic wave resonators (FPAR) using the lowest order symmetric Lamb wave (S0) propagating in highly textured AlN membranes have been previously demonstrated for the first time. In this work, an experimental study of the resonators' performance vs. a variety of design parameters is performed. Devices operating in the vicinity of the stopband center exhibiting a Q-value of up to 3000 at a frequency of around 875 MHz are demonstrated. Further, low-loss high-Q micromachined 2-port longitudinally coupled thin-film resonators using the S0 mode are demonstrated for the first time. For the analysis of the proposed structures, the coupling-of-modes (COM) approach is successfully employed. Initially, the COM model is used for the extraction of physical parameters from one-port FPAR measurements. Subsequently, using the COM model, a satisfactory agreement with the proposed experimental frequency characteristics of S0 2-port FPARs has been achieved, and possibilities for further improvements in the performance discussed. Finally, the frequency spectrum of the one-port devices has been studied and the excited plate modes at different frequencies identified and presented with their Q-factors and temperature coefficients of frequency (TCF).

UI MeSH Term Description Entries
D008567 Membranes, Artificial Artificially produced membranes, such as semipermeable membranes used in artificial kidney dialysis (RENAL DIALYSIS), monomolecular and bimolecular membranes used as models to simulate biological CELL MEMBRANES. These membranes are also used in the process of GUIDED TISSUE REGENERATION. Artificial Membranes,Artificial Membrane,Membrane, Artificial
D008904 Miniaturization The design or construction of objects greatly reduced in scale. Miniaturisation,Miniaturisations,Miniaturizations
D004867 Equipment Design Methods and patterns of fabricating machines and related hardware. Design, Equipment,Device Design,Medical Device Design,Design, Medical Device,Designs, Medical Device,Device Design, Medical,Device Designs, Medical,Medical Device Designs,Design, Device,Designs, Device,Designs, Equipment,Device Designs,Equipment Designs
D000162 Acoustics The branch of physics that deals with sound and sound waves. In medicine it is often applied in procedures in speech and hearing studies. With regard to the environment, it refers to the characteristics of a room, auditorium, theatre, building, etc. that determines the audibility or fidelity of sounds in it. (From Random House Unabridged Dictionary, 2d ed) Acoustic
D012680 Sensitivity and Specificity Binary classification measures to assess test results. Sensitivity or recall rate is the proportion of true positives. Specificity is the probability of correctly determining the absence of a condition. (From Last, Dictionary of Epidemiology, 2d ed) Specificity,Sensitivity,Specificity and Sensitivity
D014159 Transducers Any device or element which converts an input signal into an output signal of a different form. Examples include the microphone, phonographic pickup, loudspeaker, barometer, photoelectric cell, automobile horn, doorbell, and underwater sound transducer. (McGraw Hill Dictionary of Scientific and Technical Terms, 4th ed) Transducer
D015203 Reproducibility of Results The statistical reproducibility of measurements (often in a clinical context), including the testing of instrumentation or techniques to obtain reproducible results. The concept includes reproducibility of physiological measurements, which may be used to develop rules to assess probability or prognosis, or response to a stimulus; reproducibility of occurrence of a condition; and reproducibility of experimental results. Reliability and Validity,Reliability of Result,Reproducibility Of Result,Reproducibility of Finding,Validity of Result,Validity of Results,Face Validity,Reliability (Epidemiology),Reliability of Results,Reproducibility of Findings,Test-Retest Reliability,Validity (Epidemiology),Finding Reproducibilities,Finding Reproducibility,Of Result, Reproducibility,Of Results, Reproducibility,Reliabilities, Test-Retest,Reliability, Test-Retest,Result Reliabilities,Result Reliability,Result Validities,Result Validity,Result, Reproducibility Of,Results, Reproducibility Of,Test Retest Reliability,Validity and Reliability,Validity, Face
D017076 Computer-Aided Design The use of computers for designing and/or manufacturing of anything, including drugs, surgical procedures, orthotics, and prosthetics. CAD-CAM,Computer-Aided Manufacturing,Computer-Assisted Design,Computer-Assisted Manufacturing,Computer Aided Design,Computer Aided Manufacturing,Computer Assisted Design,Computer Assisted Manufacturing,Computer-Aided Designs,Computer-Assisted Designs,Design, Computer-Aided,Design, Computer-Assisted,Designs, Computer-Aided,Designs, Computer-Assisted,Manufacturing, Computer-Aided,Manufacturing, Computer-Assisted
D055617 Micro-Electrical-Mechanical Systems A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps. BioMEMS,MEMS,Micro-Electro-Mechanical Systems,Micro Electrical Mechanical Systems,Micro Electro Mechanical Systems,Micro-Electrical-Mechanical System,Micro-Electro-Mechanical System,System, Micro-Electrical-Mechanical,System, Micro-Electro-Mechanical,Systems, Micro-Electrical-Mechanical,Systems, Micro-Electro-Mechanical
D019544 Equipment Failure Analysis The evaluation of incidents involving the loss of function of a device. These evaluations are used for a variety of purposes such as to determine the failure rates, the causes of failures, costs of failures, and the reliability and maintainability of devices. Materials Failure Analysis,Prosthesis Failure Analysis,Analysis, Equipment Failure,Analysis, Materials Failure,Analysis, Prosthesis Failure,Analyses, Equipment Failure,Analyses, Materials Failure,Analyses, Prosthesis Failure,Equipment Failure Analyses,Failure Analyses, Equipment,Failure Analyses, Materials,Failure Analyses, Prosthesis,Failure Analysis, Equipment,Failure Analysis, Materials,Failure Analysis, Prosthesis,Materials Failure Analyses,Prosthesis Failure Analyses

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