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High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths. 2010
Dmitriy L Voronov, and
Minseung Ahn, and
Erik H Anderson, and
Rossana Cambie, and
Chih-Hao Chang, and
Eric M Gullikson, and
Ralf K Heilmann, and
Farhad Salmassi, and
Mark L Schattenburg, and
Tony Warwick, and
Valeriy V Yashchuk, and
Lucas Zipp, and
Howard A Padmore
Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA. dlvoronov@lbl.gov
Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency, even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property, however, depends critically on the ability to create a structure with near atomic perfection. In this Letter we report on a method to produce these structures. We report measurements that show, for a 5000l/mm grating diffracting in the third order, a diffraction efficiency of 37.6% at a wavelength of 13.6nm. This work now shows a direct route to achieving high diffraction efficiency in high order at wavelengths throughout the soft x-ray energy range.
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