Two-dimensional patterns for optical alignment. 1991

M A Butler, and K B Pfeifer, and S J Martin

Two-dimensional patterns that have properties suited for optical alignment have been constructed from one-dimensional binary Barker codes. Applications include automated alignment of masks with patterns in photolithography.

UI MeSH Term Description Entries

Related Publications

M A Butler, and K B Pfeifer, and S J Martin
February 1996, Physical review letters,
M A Butler, and K B Pfeifer, and S J Martin
August 2021, Nano letters,
M A Butler, and K B Pfeifer, and S J Martin
March 2014, Advanced materials (Deerfield Beach, Fla.),
M A Butler, and K B Pfeifer, and S J Martin
August 2018, Biomedical optics express,
M A Butler, and K B Pfeifer, and S J Martin
June 2007, Biochemical and biophysical research communications,
M A Butler, and K B Pfeifer, and S J Martin
September 1999, Optics letters,
M A Butler, and K B Pfeifer, and S J Martin
January 2019, Nanomaterials (Basel, Switzerland),
M A Butler, and K B Pfeifer, and S J Martin
May 2018, Optics express,
M A Butler, and K B Pfeifer, and S J Martin
June 2014, Journal of chromatography. A,
Copied contents to your clipboard!