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Infrared wire-grid polarizer with Y2O3 ceramic substrate. 2010
Department of Electronic Systems Engineering School of Engineering, University of Shiga Prefecture, Hassaka-cho, Hikone, Shiga, 522-8533, Japan. yamada.i@e.usp.ac.jp
Using two-beam interference lithography and dry etching, we fabricated a mid-IR wire-grid polarizer consisting of a 350 nm pitch WSi grating on an Y(2)O(3) ceramic substrate, which has wider transparency than sapphire. The transmittance of TM polarization was greater than 70% in the 3-7 μm wavelength range without antireflection films, and the extinction ratio was over 20 dB in the 2.5-5 μm wavelength range. The wire-grid polarizer with the Y(2)O(3) ceramic substrate provides high durability and good IR transparency.
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