Waveguide-integrated telecom-wavelength photodiode in deposited silicon. 2011

Kyle Preston, and Yoon Ho Daniel Lee, and Mian Zhang, and Michal Lipson
School of Electrical and Computer Engineering, Cornell University, Ithaca, New York 14853, USA. kjp32@cornell.edu

We demonstrate photodiodes in deposited polycrystalline silicon at 1550 nm wavelength with 0.15 A/W responsivity, 40 nA dark current, and gigahertz time response. Subband absorption is mediated by defects that are naturally present in the polycrystalline material structure. The material exhibits a moderate absorption coefficient of 6 dB/cm, which allows the same microring resonator device to act as both a demultiplexing filter and a photodetector. We discuss the use of deposited silicon-based complementary metal-oxide semiconductor materials for nanophotonic interconnects.

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