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Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy. 2012
Abu Sebastian, and
Naveen Shamsudhin, and
Hugo Rothuizen, and
Ute Drechsler, and
Wabe W Koelmans, and
Harish Bhaskaran, and
Hans Joachim Quenzer, and
Bernhard Wagner, and
Michel Despont
IBM Research-Zurich, 8803 Rüschlikon, Switzerland. ase@zurich.ibm.com
We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.
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