Finite element analysis of electrically excited quartz tuning fork devices. 2013

Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
Department of Electronics, University of Barcelona, Marti Franques, 1, 08028 Barcelona, Spain. roria@el.ub.es

Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two free prongs. The model goes beyond the state-of-the-art of numerical simulations currently found in the literature for this QTF configuration. We present the first numerical analysis of both the electrical and mechanical behavior of QTF devices. Experimental measurements obtained with 10 units of the same model of QTF validate the finite element model with a good agreement.

UI MeSH Term Description Entries

Related Publications

Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
June 2019, Sensors (Basel, Switzerland),
Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
January 2002, Biosensors & bioelectronics,
Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
June 2016, The Review of scientific instruments,
Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
May 2019, Optics letters,
Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
January 1990, IEEE transactions on ultrasonics, ferroelectrics, and frequency control,
Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
March 2019, Sensors (Basel, Switzerland),
Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
September 2022, Optics letters,
Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
June 2014, Ultramicroscopy,
Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
December 2019, Sensors (Basel, Switzerland),
Roger Oria, and Jorge Otero, and Laura González, and Luis Botaya, and Manuel Carmona, and Manel Puig-Vidal
June 2018, Sensors (Basel, Switzerland),
Copied contents to your clipboard!