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High Q SiC microresonators. 2013

Jaime Cardenas, and Mian Zhang, and Christopher T Phare, and Shreyas Y Shah, and Carl B Poitras, and Biswajeet Guha, and Michal Lipson
School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA.

We demonstrate photonic devices based on standard 3C SiC epitaxially grown on silicon. We achieve high optical confinement by taking advantage of the high stiffness of SiC and undercutting the underlying silicon substrate. We demonstrate a 20 μm radius suspended microring resonator with Q=14,100 fabricated on commercially available SiC-on-silicon substrates.

UI MeSH Term Description Entries
D008904 Miniaturization The design or construction of objects greatly reduced in scale. Miniaturisation,Miniaturisations,Miniaturizations
D004867 Equipment Design Methods and patterns of fabricating machines and related hardware. Design, Equipment,Device Design,Medical Device Design,Design, Medical Device,Designs, Medical Device,Device Design, Medical,Device Designs, Medical,Medical Device Designs,Design, Device,Designs, Device,Designs, Equipment,Device Designs,Equipment Designs
D014159 Transducers Any device or element which converts an input signal into an output signal of a different form. Examples include the microphone, phonographic pickup, loudspeaker, barometer, photoelectric cell, automobile horn, doorbell, and underwater sound transducer. (McGraw Hill Dictionary of Scientific and Technical Terms, 4th ed) Transducer
D017554 Carbon Compounds, Inorganic Inorganic compounds that contain carbon as an integral part of the molecule but are not derived from hydrocarbons. Inorganic Carbon Compounds,Compounds, Inorganic Carbon
D017655 Silicon Compounds Inorganic compounds that contain silicon as an integral part of the molecule. Compounds, Silicon
D055617 Micro-Electrical-Mechanical Systems A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps. BioMEMS,MEMS,Micro-Electro-Mechanical Systems,Micro Electrical Mechanical Systems,Micro Electro Mechanical Systems,Micro-Electrical-Mechanical System,Micro-Electro-Mechanical System,System, Micro-Electrical-Mechanical,System, Micro-Electro-Mechanical,Systems, Micro-Electrical-Mechanical,Systems, Micro-Electro-Mechanical
D019544 Equipment Failure Analysis The evaluation of incidents involving the loss of function of a device. These evaluations are used for a variety of purposes such as to determine the failure rates, the causes of failures, costs of failures, and the reliability and maintainability of devices. Materials Failure Analysis,Prosthesis Failure Analysis,Analysis, Equipment Failure,Analysis, Materials Failure,Analysis, Prosthesis Failure,Analyses, Equipment Failure,Analyses, Materials Failure,Analyses, Prosthesis Failure,Equipment Failure Analyses,Failure Analyses, Equipment,Failure Analyses, Materials,Failure Analyses, Prosthesis,Failure Analysis, Equipment,Failure Analysis, Materials,Failure Analysis, Prosthesis,Materials Failure Analyses,Prosthesis Failure Analyses
D020349 Surface Plasmon Resonance A biosensing technique in which biomolecules capable of binding to specific analytes or ligands are first immobilized on one side of a metallic film. Light is then focused on the opposite side of the film to excite the surface plasmons, that is, the oscillations of free electrons propagating along the film's surface. The refractive index of light reflecting off this surface is measured. When the immobilized biomolecules are bound by their ligands, an alteration in surface plasmons on the opposite side of the film is created which is directly proportional to the change in bound, or adsorbed, mass. Binding is measured by changes in the refractive index. The technique is used to study biomolecular interactions, such as antigen-antibody binding. Plasmon Resonance, Surface,Plasmon Resonances, Surface,Resonance, Surface Plasmon,Resonances, Surface Plasmon,Surface Plasmon Resonances

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