A rugged, high precision capacitance diaphragm low pressure gauge for cryogenic use. 2014

Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
Synchrotron SOLEIL, L'Orme des Merisiers, F-91192 Gif-sur-Yvette, France.

In order to carry out precise laboratory measurements of infrared absorption intensities, line profiles of molecules and organic volatile compounds for atmospheric chemistry in planetary and upper earth atmospheric layers, precise gas pressure measurement between 10(-3) and a few mbars in the 77-300 K temperature range is necessary. A prototype, rugged, precision capacitive pressure gauge for cryogenic use has been designed, built at SOLEIL and tested down to 77 K. The design includes corrosion-resistant materials and has been tailored to operate on a differential measurement scheme based on a simple, precision capacitance-to-digital converter chip, instead of high precision floating capacitive bridges, as are used in other designs. The designs conception and performance specifications are presented here, illustrated by a precision of better than 1% in the 0.2-40 mbar range, with a resolution of 2 × 10(-3) mbar. The gauge is tunable and can be adjusted for higher precision and a better resolution, at the expense of the maximum high-pressure range.

UI MeSH Term Description Entries

Related Publications

Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
August 1983, Archives italiennes de biologie,
Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
January 1982, Journal of medical engineering & technology,
Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
July 1968, The Journal of physiology,
Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
May 2022, The Review of scientific instruments,
Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
January 1980, Journal of the Parenteral Drug Association,
Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
May 2009, The Review of scientific instruments,
Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
August 1949, The Review of scientific instruments,
Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
July 1979, The Journal of physiology,
Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
January 2000, IEEE transactions on ultrasonics, ferroelectrics, and frequency control,
Leatitia Lago, and Christian Herbeaux, and Marc Bol, and Pascale Roy, and Laurent Manceron
May 1975, IEEE transactions on bio-medical engineering,
Copied contents to your clipboard!