Laser heterodyne interferometer with rotational error compensation for precision displacement measurement. 2018

Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng

A laser heterodyne interferometer with rotational error compensation is proposed for precision displacement measurement. In this interferometer, the rotational error of the measured object is obtained by using an angle detecting unit which is composed of a semi-reflective film, a polarizing beam splitter, a quarter-wave plate, a convex lens and a two-dimensional position sensitive detector. And the obtained rotational angle is used for compensating its influence on displacement measurement result. The optical configuration of the proposed interferometer is designed, and the mathematical model for displacement measurement with rotational error compensation is established. The coupling effect of axial displacement on rotational angle measurement and the rotational angle range used for compensation on displacement measurement are discussed in detail. To verify feasibility of the proposed interferometer, the experimental setup was constructed and several verification experiments were performed.

UI MeSH Term Description Entries

Related Publications

Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng
May 1991, Applied optics,
Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng
September 2020, Journal of the Optical Society of America. A, Optics, image science, and vision,
Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng
February 2000, Applied optics,
Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng
April 2014, Optics letters,
Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng
April 2018, Optics express,
Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng
February 2001, The Journal of the Acoustical Society of America,
Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng
January 1989, Acta oto-laryngologica. Supplementum,
Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng
April 2016, Optics express,
Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng
August 1985, Applied optics,
Enzheng Zhang, and Benyong Chen, and Hao Zheng, and Liping Yan, and Xueying Teng
May 2011, Optics express,
Copied contents to your clipboard!