The mixed samples of nylon film enrichment of Cr, Pb and Cd three elements and glass fiber membrane filter were as the research object. With the method of superposition of membrane filter, the XRF spectra were measured under different thin film samples thicknesses. According the changes of characteristic XRF of Cr, Pb and Cd elements in the mixed sample and Ca, As and Sr elements in glass fiber membranes, the effects of sample thickness on thin film method XRF spectrum measurement were studied. The study results showed that the effects of thin film sample thickness on the fluorescent properties of elements with characteristic spectral lines in different energy ranges were different. The energy of characteristic spectral lines was greater, the loss of element characteristic X-ray fluorescence when it passed through membrane and reached detector was less. But matrix effect caused by thin film sample thickness increase was stronger with the energy of characteristic spectral lines greater. The background fluorescent intensity in corresponding characteristic spectral line location was greater. So the impact of matrix effect caused by sample thickness increase on thin film method XRF spectrum measurement sensitivity was greater. For elements with low energy characteristic spectral lines (energy≤7 keV), the way of increasing thin film sample thickness in order to increase the mass-thickness concentration of component measured, can not effectively improve the sensitivity of thin film method XRF spectrum measurement. And thin film samples thickness within 0.96 mm is conductive to the measurement and analysis of XRF spectrum. For element with higher energy characteristic spectra lines(energy＞7 keV), the sensitivity of XRF spectrum measurement can be appropriately increased by the way of increase thin film sample thickness in order to increase the mass-thickness concentration of component measured. And thin film samples thickness within 0.96～2.24 mm is more conductive to the measurement and analysis of XRF spectrum. The study provides an important theoretical basis for thin sample preparation and enrichment technology of thin film method X-ray fluorescence spectrum analysis the atmosphere and water heavy metal.