Diffractive optical elements in single crystal diamond. 2020

Thibault Wildi, and Marcell Kiss, and Niels Quack

We demonstrate the design, fabrication, and experimental characterization of near-field binary phase transmission diffractive optical elements (DOEs) in single crystal diamond. Top-hat and arbitrary pattern DOE beam shapers were numerically optimized using an iterative Fourier transform algorithm (IFTA). Commercially available single crystal diamond plates (3mm×3mm×0.3mm) were patterned using hardmask deposition (α-Si), e-beam lithography, and O2 plasma-based diamond reactive ion etching. The resulting binary phase relief patterns were characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM). Experimental characterization of the single crystal diamond DOEs in transmission at λ=532nm confirms excellent uniformity of the resulting top-hat beam profile as required in copper welding applications.

UI MeSH Term Description Entries

Related Publications

Thibault Wildi, and Marcell Kiss, and Niels Quack
October 2009, Applied optics,
Thibault Wildi, and Marcell Kiss, and Niels Quack
July 1997, Applied optics,
Thibault Wildi, and Marcell Kiss, and Niels Quack
February 2020, Applied optics,
Thibault Wildi, and Marcell Kiss, and Niels Quack
July 2012, Optics express,
Thibault Wildi, and Marcell Kiss, and Niels Quack
July 2005, Applied optics,
Thibault Wildi, and Marcell Kiss, and Niels Quack
August 2007, Optics express,
Thibault Wildi, and Marcell Kiss, and Niels Quack
December 2023, Optics express,
Thibault Wildi, and Marcell Kiss, and Niels Quack
March 2010, Applied optics,
Thibault Wildi, and Marcell Kiss, and Niels Quack
December 2014, Nature communications,
Copied contents to your clipboard!