The purpose of this study was to measure the surface dose and build-up region depth dose characteristics of 6 MV photon beams in Cyberknife and helical tomotherapy (HT) systems for non-standard small fields using parallel plate chambers (Roos and Markus), Gafchromic EBT3 films, and nanoDot optically stimulated luminescence dosimeters (OSLDs), as well as to investigate the effect of oblique incidence on the surface dose of the beam. All measurements were conducted in a virtual water phantom under machine-specific reference conditions. The Roos and OSLDs overestimated the surface dose when compared with the Markus chamber and EBT3 films by 20%. We applied water equivalent thickness (WET) correction to account for the intrinsic build-up thickness of the detectors from their effective point of measurement (EPOM). With WET correction, a reasonably close surface dose estimate was obtained for all detectors, within 1.9% agreement for the 60 mm collimator of Cyberknife and 3.1% agreement for the HT system, with a 5 × 10 cm2 field size. The surface dose increased from the normally incident Cyberknife and HT fields with increasing angle of incidence. The surface dose increased to twice its value at normal incidence for highly oblique angles of incidence above 55°. For the tested fields, a reasonable surface dose estimate could be measured with the detectors if the correction for intrinsic buildup thickness was applied. Nevertheless, the use of Roos chambers with large dimensions and nanoDot OSLDs is not recommended for estimating the surface dose for small fields.