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Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer. 2021

Federico Galeotti, and Gustav Lindgren, and Maurangelo Petruzzella, and Frank W M van Otten, and Hamed Sadeghian Marnani, and Abbas Mohtashami, and Rob van der Heijden, and Andrea Fiore
Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, Eindhoven, the Netherlands. Electronic address: f.galeotti@tue.nl.

The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems.

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