BACKGROUND Kilovoltage (kV) X-ray beams are an essential modality in radiotherapy. Solid state detectors are widely available in radiotherapy departments, but their use for kV dosimetry has been limited to date. This study aimed to evaluate the dosimetric performance of a range of solid state detectors for kV dosimetry. METHODS Percentage depth doses (PDDs) and relative output factors (ROFs) were measured on an XStrahl 300 unit (XStrahl-Ltd., UK) using 60, 100, 150, and 300 kVp X-ray beams. The fields were defined by circular applicators with field sizes of 2, 5, 8, and 10 cm diameter and square applicators of field sizes 10 × 10 and 20 × 20 cm2 . The following Physikalisch-Technische Werkstätten (PTW) dosimeters were used for measurements: Advanced Markus, PinPoint 3D and Semiflex ionization chambers; photon, electron, and stereotactic radiosurgery (SRS) diodes plus the microDiamond detector. All PDDs were normalized at 5 mm depth, and ROFs were measured at 3 mm depth to avoid collisions with the end of the applicators. ROFs measured using chambers were corrected for polarity and ion-recombination effects. CONCLUSIONS PDD measurements for 60, 100, and 150 kVp beams exhibited good agreement between all diodes and the ionization chambers over the entire range of depths except in the first few millimeters near the surface. However, for the 300 kVp, all diode detectors exhibited an overresponding behavior compared to reference depth dose data measured with the Advanced Markus chamber. ROFs with the diodes were higher than the Advanced Markus chamber at low energy, and the magnitude of these differences is inversely proportional to the field sizes. The PTW P diode showed the highest variation of up to 15% in the output factor compared to the Advanced Markus chamber. CONCLUSIONS This study evaluated the dosimetric performance of a range of solid state detectors in kV relative dosimetry. This study showed that diode detectors are a suitable replacement for ionization chambers for the PDD measurement of low energy kV beams (60-150 kVp) except for the PDD of 60 kVp with the smaller field sizes. However, an overresponding behavior of diode detectors at 300 kVp beams shows that diode detectors are not suitable for the PDD measurement of high energy kV beams. Generally, all solid state detectors overresponded to ROF measurements, indicating that it is not suitable for ROF measurements. In general, both shielded and unshielded diodes produced a similar dosimetric response, which demonstrates that the energy dependence of solid state detectors should be considered before they are used for any kV relative dosimetric measurements.