Xenon Difluoride Dry Etching for the Microfabrication of Solid Microneedles as a Potential Strategy in Transdermal Drug Delivery. 2023

Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
UNAM-National Nanotechnology Research Center, Bilkent University, Ankara, 06800, Turkey.

Although hypodermic needles are a "gold standard" for transdermal drug delivery (TDD), microneedle (MN)-mediated TDD denotes an unconventional approach in which drug compounds are delivered via micron-size needles. Herein, an isotropic XeF2 dry etching process is explored to fabricate silicon-based solid MNs. A photolithographic process, including mask writing, UV exposure, and dry etching with XeF2 is employed, and the MN fabrication is successfully customized by modifying the CAD designs, photolithographic process, and etching conditions. This study enables fabrication of a very dense MNs (up to 1452 MNs cm-2 ) with height varying between 80 and 300 µm. Geometrical features are also assessed using scanning electron microscopy (SEM) and 3D laser scanning microscope. Roughness of the MNs are improved from 0.71 to 0.35 µm after titanium and chromium coating. Mechanical failure test is conducted using dynamic mechanical analyzer to determine displacement and stress/strain values. The coated MNs are subjected to less displacement (≈15 µm) upon the applied force. COMSOL Multiphysics analysis indicates that MNs are safe to use in real-life applications with no fracture. This technique also enables the production of MNs with distinct shape and dimensions. The optimized process provides a wide range of solid MN types to be utilized for epidermis targeting.

UI MeSH Term Description Entries
D008845 Microinjections The injection of very small amounts of fluid, often with the aid of a microscope and microsyringes. Microinjection
D009339 Needles Sharp instruments used for puncturing or suturing. Hypodermic Needles,Hypodermic Needle,Needle,Needle, Hypodermic,Needles, Hypodermic
D000279 Administration, Cutaneous The application of suitable drug dosage forms to the skin for either local or systemic effects. Cutaneous Drug Administration,Dermal Drug Administration,Drug Administration, Dermal,Percutaneous Administration,Skin Drug Administration,Transcutaneous Administration,Transdermal Administration,Administration, Dermal,Administration, Transcutaneous,Administration, Transdermal,Cutaneous Administration,Cutaneous Administration, Drug,Dermal Administration,Drug Administration, Cutaneous,Skin Administration, Drug,Administration, Cutaneous Drug,Administration, Dermal Drug,Administration, Percutaneous,Administrations, Cutaneous,Administrations, Cutaneous Drug,Administrations, Dermal,Administrations, Dermal Drug,Administrations, Percutaneous,Administrations, Transcutaneous,Administrations, Transdermal,Cutaneous Administrations,Cutaneous Administrations, Drug,Cutaneous Drug Administrations,Dermal Administrations,Dermal Drug Administrations,Drug Administrations, Cutaneous,Drug Administrations, Dermal,Drug Skin Administrations,Percutaneous Administrations,Skin Administrations, Drug,Skin Drug Administrations,Transcutaneous Administrations,Transdermal Administrations
D012867 Skin The outer covering of the body that protects it from the environment. It is composed of the DERMIS and the EPIDERMIS.
D016503 Drug Delivery Systems Systems for the delivery of drugs to target sites of pharmacological actions. Technologies employed include those concerning drug preparation, route of administration, site targeting, metabolism, and toxicity. Drug Targeting,Delivery System, Drug,Delivery Systems, Drug,Drug Delivery System,Drug Targetings,System, Drug Delivery,Systems, Drug Delivery,Targeting, Drug,Targetings, Drug
D055616 Microtechnology Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms. Microfabrication,Micromachining,Micromanufacturing,Microfabrications,Micromachinings,Micromanufacturings,Microtechnologies

Related Publications

Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
March 2004, Advanced drug delivery reviews,
Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
April 2010, International journal of pharmaceutics,
Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
April 2022, Biomacromolecules,
Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
January 2008, Frontiers in bioscience : a journal and virtual library,
Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
May 2008, Biomaterials,
Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
April 2013, Journal of drug targeting,
Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
September 2013, Biotechnology letters,
Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
April 2023, International journal of pharmaceutics,
Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
February 2019, Drug development and industrial pharmacy,
Ismail Eş, and Abdullah Kafadenk, and M Burak Gormus, and Fatih Inci
January 2019, Biomedicine & pharmacotherapy = Biomedecine & pharmacotherapie,
Copied contents to your clipboard!