A micromachined silicon sieve electrode for nerve regeneration applications. 1994

T Akin, and K Najafi, and R H Smoke, and R M Bradley
Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor 48109.

A micromachined silicon sieve electrode has been developed and fabricated to record from and stimulate axons/fibers of the peripheral nervous system by utilizing the nerve regeneration principle. The electrode consists of a 15-microns-thick silicon support rim, a 4-microns-thick diaphragm containing different size holes to allow nerve regeneration, thin-film iridium recording/stimulating sites, and an integrated silicon ribbon cable, all fabricated using boron etch-step and silicon micromachining techniques. The thin diaphragm is patterned using reactive ion etching to obtain different size holes with diameters as small as 1 micron and center-center spacings as small as 10 microns. The holes are surrounded by 100-200 microns 2 anodized iridium oxide sites, which can be used for both recording and stimulation. These sites have impedances of less than 100 k omega @ 1 kHz and charge delivery capacities in the 4-6 mC/cm2 range. The fabrication process is single-sided, has high yield, requires only five masks, and is compatible with integrated multilead silicon ribbon cables. The electrodes were implanted between the cut ends of peripheral taste fibers of rats (glossopharyngeal nerve), and axons functionally regenerated through holes, responding to chemical, mechanical, and thermal stimuli.

UI MeSH Term Description Entries
D008422 Materials Testing The testing of materials and devices, especially those used for PROSTHESES AND IMPLANTS; SUTURES; TISSUE ADHESIVES; etc., for hardness, strength, durability, safety, efficacy, and biocompatibility. Biocompatibility Testing,Biocompatible Materials Testing,Hemocompatibility Testing,Testing, Biocompatible Materials,Testing, Hemocompatible Materials,Hemocompatibility Testings,Hemocompatible Materials Testing,Materials Testing, Biocompatible,Materials Testing, Hemocompatible,Testing, Biocompatibility,Testing, Hemocompatibility,Testing, Materials,Testings, Biocompatibility
D008839 Microelectrodes Electrodes with an extremely small tip, used in a voltage clamp or other apparatus to stimulate or record bioelectric potentials of single cells intracellularly or extracellularly. (Dorland, 28th ed) Electrodes, Miniaturized,Electrode, Miniaturized,Microelectrode,Miniaturized Electrode,Miniaturized Electrodes
D009416 Nerve Regeneration Renewal or physiological repair of damaged nerve tissue. Nerve Tissue Regeneration,Nervous Tissue Regeneration,Neural Tissue Regeneration,Nerve Tissue Regenerations,Nervous Tissue Regenerations,Neural Tissue Regenerations,Regeneration, Nerve,Regeneration, Nerve Tissue,Regeneration, Nervous Tissue,Regeneration, Neural Tissue,Tissue Regeneration, Nerve,Tissue Regeneration, Nervous,Tissue Regeneration, Neural
D004567 Electrodes, Implanted Surgically placed electric conductors through which ELECTRIC STIMULATION is delivered to or electrical activity is recorded from a specific point inside the body. Implantable Electrodes,Implantable Stimulation Electrodes,Implanted Electrodes,Implanted Stimulation Electrodes,Electrode, Implantable,Electrode, Implantable Stimulation,Electrode, Implanted,Electrode, Implanted Stimulation,Electrodes, Implantable,Electrodes, Implantable Stimulation,Electrodes, Implanted Stimulation,Implantable Electrode,Implantable Stimulation Electrode,Implanted Electrode,Implanted Stimulation Electrode,Stimulation Electrode, Implantable,Stimulation Electrode, Implanted,Stimulation Electrodes, Implantable,Stimulation Electrodes, Implanted
D004867 Equipment Design Methods and patterns of fabricating machines and related hardware. Design, Equipment,Device Design,Medical Device Design,Design, Medical Device,Designs, Medical Device,Device Design, Medical,Device Designs, Medical,Medical Device Designs,Design, Device,Designs, Device,Designs, Equipment,Device Designs,Equipment Designs
D005930 Glossopharyngeal Nerve The 9th cranial nerve. The glossopharyngeal nerve is a mixed motor and sensory nerve; it conveys somatic and autonomic efferents as well as general, special, and visceral afferents. Among the connections are motor fibers to the stylopharyngeus muscle, parasympathetic fibers to the parotid glands, general and taste afferents from the posterior third of the tongue, the nasopharynx, and the palate, and afferents from baroreceptors and CHEMORECEPTOR CELLS of the carotid sinus. Cranial Nerve IX,Ninth Cranial Nerve,Cranial Nerve IXs,Cranial Nerve, Ninth,Cranial Nerves, Ninth,Glossopharyngeal Nerves,Nerve, Glossopharyngeal,Nerve, Ninth Cranial,Nerves, Glossopharyngeal,Nerves, Ninth Cranial,Ninth Cranial Nerves
D000818 Animals Unicellular or multicellular, heterotrophic organisms, that have sensation and the power of voluntary movement. Under the older five kingdom paradigm, Animalia was one of the kingdoms. Under the modern three domain model, Animalia represents one of the many groups in the domain EUKARYOTA. Animal,Metazoa,Animalia
D012825 Silicon A trace element that constitutes about 27.6% of the earth's crust in the form of SILICON DIOXIDE. It does not occur free in nature. Silicon has the atomic symbol Si, atomic number 14, and atomic weight [28.084; 28.086]. Silicon-28,Silicon 28
D051381 Rats The common name for the genus Rattus. Rattus,Rats, Laboratory,Rats, Norway,Rattus norvegicus,Laboratory Rat,Laboratory Rats,Norway Rat,Norway Rats,Rat,Rat, Laboratory,Rat, Norway,norvegicus, Rattus

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