Real-time spectroscopic ellipsometry study of the growth of amorphous and microcrystalline silicon thin films prepared by alternating silicon deposition and hydrogen plasma treatment.
1995
Layadi, and
Roca i Cabarrocas P, and
Drévillon, and
Solomon
UI
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Layadi, and
Roca i Cabarrocas P, and
Drévillon, and
Solomon