Application of X-ray Optics to Energy-Dispersive Spectroscopy. 1998

McCarthy, and McMillan
Research and Development Department, NORAN Instruments Inc., 2551 West Beltline Highway, Middleton, WI 53562

: X-ray optics have been used in X-ray analytical instruments for several years. Applications of X-ray optics have been reported in X-ray diffraction, X-ray fluorescence, and wavelength dispersive spectroscopy. X-ray optics have been used to increase the X-ray flux incident on the sample or to direct and focus emitted X-rays from a sample. We report here the use of a grazing incidence optic (GIO) as a flux-enhancing collimator for use with an energy-dispersive (ED) detector used to perform electron beam microanalysis. We found that the GIO in combination with an ED spectrometer (EDS) provides substantial intensity gain for X-ray lines with energy below 1 keV. The GIO is also found to provide a modest focus effect, and introduces minimal spectral artifacts.

UI MeSH Term Description Entries

Related Publications

McCarthy, and McMillan
July 1995, Journal of synchrotron radiation,
McCarthy, and McMillan
September 2016, The Review of scientific instruments,
McCarthy, and McMillan
November 2019, Scientific reports,
McCarthy, and McMillan
October 2025, Physical review letters,
McCarthy, and McMillan
January 2015, The Journal of clinical pediatric dentistry,
McCarthy, and McMillan
May 2024, Ultramicroscopy,
McCarthy, and McMillan
July 2023, Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada,
McCarthy, and McMillan
June 2010, Physical chemistry chemical physics : PCCP,
Copied contents to your clipboard!