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Thin film encapsulation for organic light-emitting diodes using inorganic/organic hybrid layers by atomic layer deposition. 2015

Hao Zhang, and He Ding, and Mengjie Wei, and Chunya Li, and Bin Wei, and Jianhua Zhang
Key Laboratory of Advanced Display and System Applications, Ministry of Education, Shanghai University, Yanchang Road 149, Shanghai, 200072 China ; School of Mechatronic Engineering and Automation, Shanghai University, Yanchang Road 149, Shanghai, 200072 China.

A hybrid nanolaminates consisting of Al2O3/ZrO2/alucone (aluminum alkoxides with carbon-containing backbones) grown by atomic layer deposition (ALD) were reported for an encapsulation of organic light-emitting diodes (OLEDs). The electrical Ca test in this study was designed to measure the water vapor transmission rate (WVTR) of nanolaminates. We found that moisture barrier performance was improved with the increasing of the number of dyads (Al2O3/ZrO2/alucone) and the WVTR reached 8.5 × 10(-5) g/m(2)/day at 25°C, relative humidity (RH) 85%. The half lifetime of a green OLED with the initial luminance of 1,500 cd/m(2) reached 350 h using three pairs of the Al2O3 (15 nm)/ZrO2 (15 nm)/alucone (80 nm) as encapsulation layers.

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