Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal. 2022

Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
School of Mechanical and Electrical Engineering, Xi'an University of Architecture and Technology, Xi'an 710055, China.

Anchor loss is usually the most significant energy loss factor in Micro-Electro-Mechanical Systems (MEMS) resonators, which seriously hinders the application of MEMS resonators in wireless communication. This paper proposes a cross-section connection phononic crystal (SCC-PnC), which can be used for MEMS resonators of various overtone modes. First, using the finite element method to study the frequency characteristics and delay line of the SCC-PnC band, the SCC-PnC has an ultra-wide bandgap of 56.6-269.6 MHz. Next, the effects of the height h and the position h1 of the structural parameters of the small cross-connected plate on the band gap are studied, and it is found that h is more sensitive to the width of the band gap. Further, the SCC-PnC was implanted into the piezoelectric MEMS resonator, and the admittance and insertion loss curves were obtained. The results show that when the arrangement of 4 × 7 SCC-PnC plates is adopted, the anchor quality factors of the third-order overtone, fifth-order overtone, and seventh-order overtone MEMS resonators are increased by 1656 times, 2027 times, and 16 times, respectively.

UI MeSH Term Description Entries

Related Publications

Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
December 2020, Micromachines,
Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
July 2023, Micromachines,
Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
December 2023, Micromachines,
Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
October 2023, Micromachines,
Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
July 2022, Micromachines,
Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
September 2016, Ultrasonics,
Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
October 2017, Optics express,
Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
March 2014, Optics letters,
Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
June 2020, Sensors (Basel, Switzerland),
Lixia Li, and Chuang Zhu, and Haixia Liu, and Yan Li, and Qi Wang, and Kun Su
January 2024, Nanomaterials (Basel, Switzerland),
Copied contents to your clipboard!