Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator. 2023

Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
School of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This technique achieves an anchor quality factor of 175,000 compared to 58,000 obtained from the conventional tether design, representing a three-fold enhancement. Furthermore, the unloaded quality factor of the proposed design improved from 23,750 to 27,442, representing a 1.2-fold improvement.

UI MeSH Term Description Entries

Related Publications

Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
December 2020, Micromachines,
Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
October 2022, Sensors (Basel, Switzerland),
Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
December 2023, Micromachines,
Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
May 2022, IEEE transactions on ultrasonics, ferroelectrics, and frequency control,
Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
July 2015, The Review of scientific instruments,
Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
September 2019, Micromachines,
Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
October 2018, The Review of scientific instruments,
Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
May 2015, IEEE transactions on ultrasonics, ferroelectrics, and frequency control,
Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
January 2024, Microsystems & nanoengineering,
Mohammed Awad, and Temesgen Bailie Workie, and Jingfu Bao, and Ken-Ya Hashimoto
November 2018, Sensors (Basel, Switzerland),
Copied contents to your clipboard!